Dry pump

Screw Type Dry Vacuum Pump LS Series

Features

  • High pumping speed near atmospheric pressure drastically reduces pump down time.
  • Built-in ECO-SHOCK technology reduces power consumption significantly for clean applications.
  • Built-in silencer achieves a noise level of 61dB(A) or less
  • Low Running-Cost
  • Available in 4 models

Pumping speed 120 – 1000m3/h

Ultimate pressure 6,0×10-3 – 1,0×10-3 mbar

 

Special Features / Further Applications

 

Clean Process („C-Type“): For clean processes involving gasses like Air and N2 (LS***A-C)

  • TMP backing pump etc.
  • Load lock room
  • Lamination
  • Vapor deposition
  • Sputtering

Light Process („L-Type“): For light processes involving steam and other difficult gases (LS***A-L)

  • General industrial use
  • Ashing
  • Freeze drying
  • Vacuum drying

 

Download

 

 

Scroll Type Dry Vacuum Pump DIS Series

Features

  • Double wrap type scroll pump which consists of 1 orbiting and 2 fixed scrolls
  • Operation from atmospheric pressure is possible
  • High ultimate pressure level is attainable
  • Low vibration and low noise
  • Maintenance cycle can be controlled by hour meter.

Pumping speed 5,4 – 30,0 m3/h

Ultimate pressure 50,0×10-3 – 10,0×10-3 mbar

 

Special Features / Further Applications

 

  • Analytical equipment
  • Gas recovery system
  • Coating equipment
  • Back pump for TMP
  • Helium leak detector
  • Manufacturing process for semiconductor.

 

Download

Scroll Type Dry Vacuum Pump DISL Series

Features

Single wrap type scroll which consists of each 1 orbiting and
fixed scroll.
Tough type scroll pump than DIS series against incoming particles and suitable for industrial use.

Pumping speed 6,0 – 25,8 m3/h

Ultimate pressure 0,2 – 0,3 mbar

 

Special Features / Further Applications

 

  • Pick and transfer system
  • Cleaning and drying
  • Degassing / deforming
  • Packaging

 

Download

Diaphragm Dry Vacuum Pump DTC Series

 

Features

  • All contacted parts of the gas are made of PTFE and FPM
  • Suitable for pumping out corrosive gas or organic solvent
  • High vacuum down to 10 mbar
  • Compact

 

Special Features / Further Applications

 

  • Rotary evaporator
  • Evaporating system
  • Vacuum Concentrator
  • Vacuum filtration
  • Exhaust of gas-transfer tube
  • Vacuum drying systems
  • Laser-gas circulation
  • Centrifuge
  • Medical/Pharmaceutical equipments
  • Analysis/scientific equipments

Pumping speed 1.32 m3/h

Ultimate pressure 10,0 mbar

 

Download

Diaphragm Type Dry Vacuum Pump DAU-20DTU-20

Features

  • High vacuum type diaphragm pump
  • Low vibration
  • High corrosion resistant. (DTU-20)

 

Special Features / Further Applications

 

  • Backing pump for TMP
  • Analytical equipment
  • Biochemical analysis
  • Gas charging
  • Vacuum drying systems
  • Evaporators etc.

Pumping speed 1,2 m3/h

Ultimate pressure 2,0 mbar

 

Download

Diaphragm Type Dry Vacuum Pump DA Series

Features

  • Diaphragm type pump creates vacuum by reciprocating
    movement of rubber diaphragms.
  • Pump structure creates an Oil-free environment and maintenance
  • Various pumping speed and two/single stages are selectable
    depends on your required pressure and pumping volume.

 

Special Features / Further Applications

 

  • Vacuum chucks, wafer and tip handling devices.
  • Vacuum tweezers, medical appliances.
  • Printing equipment.
  • Automatic packing machines.
  • Optical appliances

Pumping speed 1,2 – 2,4 m3/h

Ultimate pressure 199,0 – 53,3 mbar

 

Download

Dry Vacuum Pump CR Series

Features

  • Air cooled for low running costs.
  • No requirement for cooling water and nitrogen gas.
  • Low power consumption, air tight and light weight are featured in this pump.
  • Possible to pump down water vapor by use of gas ballast.
  • Integrated silencer results in a compact design.

 

Special Features / Further Applications

 

  • Clean gas vacuum pumping such as air, inert gas.
  • Water vapor pumping  for vacuum dryer equipment (gas ballast is required)
  • Vacuum equipment such as sputtering, evaporator, etc.

Pumping speed 16 – 300 m3/h

Ultimate pressure 3,0×10-2 – 5,0×10-3 mbar

 

Download

Dry Vacuum Pump CR Series Version B

Features

  • Air cooled for low running costs.
  • No requirement for cooling water and nitrogen gas.
  • Low power consumption, air tight and light weight are featured in this pump.
  • Possible to pump down water vapor by use of gas ballast.
  • Applicable standard: CE, cTUVus.

 

Special Features / Further Applications

 

  • Clean gas vacuum pumping such as air, inert gas.
  • Water vapor pumping  for vacuum dryer equipment (gas ballast is required)
  • Vacuum equipment such as sputtering, evaporator, etc.

Pumping speed 16 – 300 m3/h

Ultimate pressure 3,0×10-2 – 5,0×10-3 mbar

 

Download

Dry Vacuum Pump GR Series

Features

  • Particularly useful for high load applications such as
    repeated pump down between atmospheric pressure and
    vacuum and continuous running in the high pressure range.
  • Useful for load/unload lock chambers which require high
  • A universal induction motor is used. An explosion proof
    motor is available as an option.
  • For motor power. Specify voltage required when ordering.
    Either 200 VAC class or Multiple voltage motors are

 

Special Features / Further Applications

 

  • Clean gas vacuum pumping such as air, inert gas
  • Load/unload lock chambers of various types of deposition
    equipment
  • General industrial applications such as vacuum dryer,
    vacuum gas exchange in vacuum heat insulation and gas
    charging, vacuum degassing, etc

Pumping speed 62 – 183 m3/h

Ultimate pressure 5,0×10-2 mbar

 

Download