Turbo Molecular pump

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Desktop high vacuum pumping station featuring a low noise, low vibration design and ceramic ball bearing turbo molecular pump. Simple, easy to read touch screen control for user-friendly operation.

 

Features:

 

Consideration for use environment on desktop

  • Low noise

Running noise and vibration during operation are reduced.
43dB(A) or less at Ultimate pressure. (Measured by ULVAC standard for ICF flange type.）

  • User-friendly
    Simple operation with easy to read touch panel display
  • Pressure indication

Designed for easy integration of up to 2 vacuum gauges

 

Special Features / Further Applications

 

  • Evacuation system of various experiment and  R&D equipment
  • Evacuation system from atmospheric pressure to high vacuum
  • General use for high vacuum evacuation system

Pumping speed: N2 – 252 m3/h; He – 216 m3/h; H2 – 252 m3/h

Ultimate pressure 10-8 mbar

 

Download[/vc_column_text][/vc_accordion_tab][vc_accordion_tab title=”Turbo Molecular Pump UTM-FH, FW Series”][vc_column_text]

 

The UTM-FH and UTM-FW is compound turbo molecular using 5 axis magnetic levitation and digital controlled, and realized advantages such as high performance and reliability and energy savings. The UTM-FH series, which has improved compression ratio for hydrogen, is high back pressure and high compression type and for light to middle processes. The UTM-FW series is wide range and high flow type and for high load process and middle to hard processes.

 

Features:

 

  • Abundant variations from 350L/s to world’s largest 6300L/s
    (digital magnetic controlled bearing type).
  • Maintainable stable pumping performance against change of
    back pressure (FH series).
  • Optional internal heating system to control rotor temperature
    and reduce adhesion of side reaction by-products (FW series).
  • Excellent anti-corrosion surface treatment (excluding 3303FH
    and 6300FH). Optional special surface treatments (e.g. Nickel
    plating + cation electrodeposition, special deposited film,
    aluminum anodization) are available as necessary.
  • Mountable in all direction.
  • Variable speed system makes it possible to change the
    pumping speed in the range from 25% through 100%.
  • There is no limitation to combine any power supply and pump
    main unit to change cable length because of using coupling
    free system and tuning free system.
  • Self power generation by regenerative energy is used for
    backup power supply at power outage by using battery free
    Troublesome battery replacement is not necessary.
  • Built-in monitoring/self-diagnostic and communication functions
    enable to configure centralized monitoring system.
  • Safety design with fracture energy absorption construction
    can reduce damage on vacuum system when trouble
    happened with the pumps.
  • High durability and high reliability have been realized by
    experiments such as air rushing-in testing, various touching
    down testing, forced destruction testing for rotor and foreign
    material drop testing (Si wafer fall).

 

Special Features / Further Applications

 

  • [UTM-FH series]
  • Main evacuation of light to middle processes such as
    evaporator, sputtering system, dry etching, etc. where
    there are not any side reaction by-products
  • Pumping system of analytical instrument, R&D system,
    laboratory equipment, etc.
  • Pumping system for those equipment and system for
    light gas such as H2 and He
  • Multiple turbo molecular pumps with centralized back
    pump configuration
  • [UTM-FW series]
  • Main evacuation of middle to hard processes such as
    dry etching, CVD system, etc.
  • High flow gas evacuation for dry etching, CVD system,
    sputtering system, etc.
  • Main evacuation of analytical instrument, R&D system,
    laboratory equipment, etc.

Pumping speed: N2 1.188-22.680 m3/h; H2 1.116-18.000 m3/h

Ultimate pressure 10-10 mbar

 

Download[/vc_column_text][/vc_accordion_tab][vc_accordion_tab title=”Turbo Molecular Pump UTM Series”][vc_column_text]

 

The UTM series is an all the blades type turbo molecular pump which carries a pivot bearing (lower side) and a magnetic bearing (upper side). Mechanical contact at the time of a high velocity revolution is reduced by adoption of the pivot bearing. Moreover, a low vibration and a high compression ratio are realized.

 

Features:

 

  • Magnetic bearing was adopted as the upper part, pivot
    bearing was adopted as the lower part, and mechanical
    contact at the time of a high velocity revolution is eliminated.
    Thereby, bearing exchange and an oil change become
    unnecessary and realize extended life-span of bearing.
  • Fine dynamic balance rotor and highly efficient bearing by
    design of original blades realize a high velocity revolution,
    and inlet performance (high compression ratio) of low
    molecular weight gas, such as H2 and He.
  • A pivot bearing and fluoride oil (oil whose saturated vapor
    pressure is chemically stable and is low) are adopted, and
    environment without the infinite oil near zero is realized.
    Achievement of clean, ultrahigh vacuum is possible.
  • Adoption of a fine dynamic balance rotor and a highly
    efficient bearing realizes low noise and low vibration.

 

Special Features / Further Applications

 

  • Main pumping systems for analysis equipment, researchand-
    development equipment, and an experimental device.
  • Main pumping system for low molecule gas, evacuation
    such as H2 and He.
  • Main pumping systems for analysis equipment and
    evaluation equipment, which are vibration sensitive

Pumping speed: N2 180-1.980 m3/h; H2 144-1.800 m3/h

Ultimate pressure 10-10 mbar

 

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